If there is a problem with the coolant in the Osaka Dry Pump, a warning signal will be issued.
The warning signal will come on 60 seconds after a coolant problem.
At this time, the pump continues to operate with a warning signal.
After 15 minutes, an alarm signal is generated and the pump stops operating.
If there is a problem with the cooling water in a system that uses hazardous gases such as CVD and ICP, the pump must be stopped within 15 minutes after executing the safety operation.
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